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Lam 200mm
[WES180003E]
Exelan HPT Chamber

AMAT 300mm
[WES180001E]
EMAX_CT+

DNS 300mm
[WES160054E]
SU-3100

Etch_Lam 300mm
[WES150020E]
Lam Kiyo Metal
Item List Total Count : 146
WES ID Maker Model WaferSize Vintage Process
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WES180003E LAM Exelan HPT Chamber 200mm 2001 Oxide Etcher/LAM Allianc...
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WES180002E DNS SU-3100 300mm 2011 DNS SU3100/300mm CU Stri...
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WES180001E AMAT EMAX_CT+ 300mm 2007 Oxide Etcher EFEM/TM/Pr...
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WES170001P KASHIYAMA SDE1203BL Dry Vacuum Pump
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WES160068P CKD VEC-CA8-X0301-3 FURNACE , CKD PRESSURE C...
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WES160067P CKD VEC-C8-X0111 FURNACE , CKD PRESSURE C...
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WES160066P CKD VEC-C8-X0118 FURNACE , CKD PRESSURE C...
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WES160065P MITSUBISHI MR-J2S-10A MEL SERVO MR-J2S-10A
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WES160064P MITSUBISHI MR-J2S-40A MEL SERVO MR-J2S-40A
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WES150028E Lam Lam Vector Express 300mm 2007 PECVD OX/Nitride Lam Ve...
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